evaporator
KDSD-170
THERMAL EVAPORATOR DUAL CHAMBER SLIDING DOOR TYPE
Kiyon offers tailor-made system which is integrated with
Glovebox system through its own in-house designing
Basic composition
characteristic
- Standard Chamber Size: 450 (W) x 450 (D) x 355/550 (H) / mm
- Source: max. 170 x 170 / mm
- Vacuum Capacity: 5.0 x 10-7 Torr
- Chamber Working Pressure: Below than 5.0 x 10-6 Torr within 30minutes
- Film Thickness Uniformity : <+/-3% within 156mm * 156mm Glass
- Metal & Organic source processing
design
- Sliding door type allows easy and safe sample put in/out
- Isolated rear door for cleaning and easy maintenance
configuration
- Auto Control by 10.5“ Touch Panel (Auto Pumping, Auto Venting, Auto System Shut Down)
- Co-deposition available
- Sample Rotation / heating or cooling option
