evaporator

KDSD-170

THERMAL EVAPORATOR DUAL CHAMBER SLIDING DOOR TYPE
Kiyon offers tailor-made system which is integrated with
Glovebox system through its own in-house designing

Basic composition

characteristic
  • Standard Chamber Size: 450 (W) x 450 (D) x 355/550 (H) / mm
  • Source: max. 170 x 170 / mm
  • Vacuum Capacity: 5.0 x 10-7 Torr
  • Chamber Working Pressure: Below than 5.0 x 10-6 Torr within 30minutes
  • Film Thickness Uniformity : <+/-3% within 156mm * 156mm Glass
  • Metal & Organic source processing
design
  • Sliding door type allows easy and safe sample put in/out
  • Isolated rear door for cleaning and easy maintenance
configuration
  • Auto Control by 10.5“ Touch Panel (Auto Pumping, Auto Venting, Auto System Shut Down)
  • Co-deposition available
  • Sample Rotation / heating or cooling option